The HEX system by Korvus Technology is a compact, modular thin-film deposition system. It is designed to satisfy various research and development needs. It features a hexagonal, high-vacuum chamber that supports multiple deposition techniques, including magnetron sputtering, thermal evaporation, and electron beam evaporation. It supports sputtering of solid metals, magnetic materials, insulators and semiconductors. It allows the combination of multiple sources to generate composite thin films.

  • 2 sputter sources
  • 1 electron beam evaporation source
  • Crystal quartz monitor to aid in film thickness measurements
  • Rotating and heated substrate holder
  • Available target materials: Ni, Au, Pd, W, Cu, Al, Ta, Ag, C