PI 85 SEM Picoindenter

The PI 85 SEM PicoIndenter is a depth-sensing indenter based on three plate capacitor actuation (inherently force-controlled) equipped with a nanoDMA III upgrade for continuous stiffness measurements up to 300Hz that can be integrated in a scanning electron microscope (SEM). This unique experimental setup makes it possible to perform quantitative nanomechanical quasi-static or dynamic experiments such as in situ continuous J-integral measurements or micromechanical spectroscopy (µMS) while simultaneously imaging within the SEM.

in situ continuous J-integral measurement

micromechanical spectroscopy (µMS)

Transducer Specifications:

  • 30 mN maximum load
  • ≤ 3 nN Load Resolution
  • ≤ 400 nN RMS Force Noise Floor
  • ≤ 0.02 nm Displacement Resolution
  • ≤ 1 nm RMS Displacement Noise Floor