PI 85 SEM Picoindenter
The PI 85 SEM PicoIndenter is a depth-sensing indenter based on three plate capacitor actuation (inherently force-controlled) equipped with a nanoDMA III upgrade for continuous stiffness measurements up to 300Hz that can be integrated in a scanning electron microscope (SEM). This unique experimental setup makes it possible to perform quantitative nanomechanical quasi-static or dynamic experiments such as in situ continuous J-integral measurements or micromechanical spectroscopy (µMS) while simultaneously imaging within the SEM.
- 30 mN maximum load
- ≤ 3 nN Load Resolution
- ≤ 400 nN RMS Force Noise Floor
- ≤ 0.02 nm Displacement Resolution
- ≤ 1 nm RMS Displacement Noise Floor