In 2024, a new Zeiss LEO1530 dedicated for in situ micromechanical testing was acquired. The microscope is equipped with a thermionic field emission gun and a unique single condenser Gemini lens system delivering outstanding resolution, crucial for high-precision material science research, with a point resolution as fine as 0.9 nm at 15 kV.
Filament type: Schottky emitter (W/ZrO)
Acceleration voltage: 0.3 – 30 kV
Typical system vacuum: ~5.10-6 mbar
Column vacuum: ~1.10-9 mbar
Detectors:
- SE-detector (Everhart-Thornley)
- Four quadrant back scatter detector
- InLens-detector
- Hybrid-pixel direct electron detector (under construction)
Additionally, a hybrid pixel detector setup for 4D transmission scanning electron microscopy applications is currently under construction.
The microscope can be equipped with various state-of-the-art micromechanical testing setups, for different static or dynamic loading scenarios.
Testing equipment:
