Precursors and defect control for halogenated CVD of thick SiC epitaxial layers / / Milan Yazdanfar.
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| Superior document: | Linkoping Studies in Science and Technology Dissertations, Number 1625 |
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| VerfasserIn: | |
| Place / Publishing House: | Linkoping, Sweden : : Linkoping University,, 2014. 2014 |
| Year of Publication: | 2014 |
| Language: | English |
| Series: | Linkoping studies in science and technology. Dissertations ;
Number 1625. |
| Online Access: | |
| Physical Description: | 1 online resource (63 pages) :; illustrations. |
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| Bibliography: | Includes bibliographical references. |
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| ISBN: | 9789175192130 (ebook) |
| ISSN: | 0345-7524 ; |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Milan Yazdanfar. |