Semiconductor strain metrology : principles and applications / / Terence K.S. Wong.
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| Year of Publication: | 2012 |
| Language: | English |
| Online Access: | |
| Physical Description: | 136 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9781608053599 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | Terence K.S. Wong. |