Advanced interconnects for ULSI technology / edited by Mikhail Baklanov, Paul S. Ho and Ehrenfried Zschech.
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| TeilnehmendeR: | |
| Year of Publication: | 2012 |
| Language: | English |
| Online Access: | |
| Physical Description: | xxvi, 579 p. :; ill. |
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| Bibliography: | Includes bibliographical references and index. |
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| ISBN: | 9780470662540 9781119963240 |
| Hierarchical level: | Monograph |
| Statement of Responsibility: | edited by Mikhail Baklanov, Paul S. Ho and Ehrenfried Zschech. |