Priv. Doz. Dr. Megan J. Cordill

Function: Vice Director
Room: 308
Phone: +43 (0) 3842-804-308
E-Mail: megan.cordill(at)


Complex Materials, Micro- and Nanomechanics, Micro- and Nanostructure Characterization


Nanoindentation, electro-mechanical in-situ testing, AFM, CLSM, electrical measurement, thin films, adhesion


Mechanics in Small Dimensions (Mechanik in kleinen Dimensionen), Übungen zu Materialkundliche Arbeitsverfahren


FLEX-E-TESTAdhesion Techniques for Films on Flexible SubstratesHigh cycle thermo-mechanical fatigue behavior of semiconductor thin filmsEPPL - Enhanced Power Pilot Line


  • Direct determination of the area function for nanoindentation experiments
    C. Saringer, M. Tkadletz, M. Kratzer, M. Cordill
    J. Mater. Res.37, ARTN: 43578 (2021)
  • Microstructural Effects on the Interfacial Adhesion of Nanometer-Thick Cu Films on Glass Substrates: Implications for Microelectronic Devices
    A. Lassnig, V. Terziyska, J. Zalesak, T. Joerg, D. Toebbens, T. Griesser, C. Mitterer, R. Pippan, M. Cordill
  • Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films
    A. Xia, R. Dedoncker, O. Glushko, M. Cordill, D. Depla, R. Franz
    J. Alloy. Compd.850, ARTN 156740 (2021)
  • A new approach to evaluate the elastic modulus of metallic foils
    C.O.W. Trost, S. Wurster, C. Freitag, A. Steinberger, M.J. Cordill
    Mater. Des.196, ARTN 109149 (2020)
  • In-operando fatigue behavior of gold metallization lines on polyimide substrate
    O. Glushko, M.J. Cordill
    Scr. Mater.186, 48-51 (2020)
  • Balancing the electro-mechanical and interfacial performance of Mo-based alloy films
    P. Kreiml, M. Rausch, V. Terziyska, H. Koestenbauer, J. Winkler, C. Mitterer, M. Cordill
    MATERIALIA12, ARTN 100774 (2020)
  • Mechanical and optical degradation of flexible optical solar reflectors during simulated low earth orbit thermal cycling
    B. Putz, S. Wurster, T.E.J. Edwards, B. Voelker, G. Milassin, D.M. Toebbens, C.O.A. Semprimoschnig, M.J. Cordill
    Acta Astronaut.175, 277-289 (2020)
  • Sputter deposition of NiW films from a rotatable target
    M. Rausch, M. Golizadeh, P. Kreiml, M. Cordill, J. Winkler, C. Mitterer
    Appl. Surf. Sci.511, ARTN 145616 (2020)
  • Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target
    M. Rausch, S. Mraz, P. Kreiml, M. Cordill, J. Schneider, J. Winkler, C. Mitterer
    J. Vac. Sci. Technol. A38, ARTN 023401 (2020)
  • The sputter performance of an industrial-scale planar Mo-target over its lifetime: Target erosion and film properties
    M. Rausch, A. Sabag, K. Pichler, G. Gruber, J. Köstenbauer, H. Köstenbauer, P. Kreiml, M. Cordill, J. Winkler, C. Mitterer
    Surface & Coatings Technology381, ARTN 125174 (2019)