The LEO-982 is a scanning electron microscope (SEM) with a field emission gun (FEG) that is dedicated for in-situ micro mechanical testing at high resolution. For imaging an Everhart Thornley Detector (SE-Detector) or an Inlens-Detector are available. Different small scale testing equipment can be installed, such as the Hysitron PI-85 SEM PicoIndenter, the ASMEC UNAT-SEM Indenter, or the AFSEM.

In-situ Equipment

PI 85 SEM Picoindenter

The PI 85 SEM PicoIndenter is a depth-sensing indenter that can be integrated in a scanning electron microscope (SEM). It is possible to perform quantitative nanomechanical testing while simultaneously imaging with the SEM.

Transducer Specifications:

  • 30 mN maximum load
  • ≤ 3 nN Load Resolution
  • ≤ 400 nN RMS Force Noise Floor
  • ≤ 0.02 nm Displacement Resolution
  • ≤ 1 nm RMS Displacement Noise Floor

ASMEC Microindenter

The nanoindenter module is designed to use as micro loading device for the measurement of forces and displacements in the scanning electron microscope (SEM). Using this nanoindenter, the deformation processes during an experiment can directly be observed with high resolution.

Transducer specifications:

  • Maximum displacement: ± 50 µm
  • Noise level displacement measurement: < 1 nm
  • Maximum force: ± 500 mN
  • Noise level force measurement: < 10µN
  • Travel range of the piezo actuator: > 100 µm
  • Maximum voltage of the piezo actuator: - 20 V to + 120 V


The combination of an AFM in situ in the SEM, termed AFSEM, allows for high depth resolution imaging of sample surfaces. The SEM is used for positioning of the AFM cantilever near the site of interest.