The LEO-982 is a scanning electron microscope (SEM) with a thermal field emission gun (FEG) that is dedicated for in situ micromechanical testing at high resolution. For imaging an Everhart Thornley Detector (SE-Detector) or an Inlens-Detector are available. Different small scale testing equipment can be installed, such as the Hysitron PI-85 SEM PicoIndenter, the FemtoTools FT-NMT04 in situ Nanoindenter, the ASMEC UNAT-SEM Indenter, or the AFSEM.

Micromechanical testing equipment