@article{Saghaeian2019, author = {Saghaeian, F. and Keckes, J. and Woehlert, S. and Rosenthal, M. and Reisinger, M. and Todt, J.}, year = {2019}, pages = {ARTN 137576}, title = {Microstructure and stress gradients in TiW thin films characterized by 40 nm X-ray diffraction and transmission electron microscopy}, volume = {691}, journal = {Thin Solid Films} }