TY - JOUR AU - Xia, A. AU - Glushko, O. AU - Cordill, M. J. AU - Franz, R. DA - 2019/01/15/ DO - 10.1116/1.5058729 IS - 1 JF - J. Vac. Sci. Technol. A PY - 2019 SE - 2019/01/15/ SP - ARTN 010601 TI - Electromechanical properties of cathodic arc deposited high entropy alloy thin films on polymer substrates VL - 37 ER -